1 XPS (X-ray photoelectron spectroscopy) Analysis

     XPS uses the X radial to irradiate on the specimen, and the atom or molecule electron stimulated emission to measure the energy distribution of electrons, and then determine the sample of atom or ion composition and status.

     XPS is main applied on the sample surface chemical characteristic and composition analysis, especially for surface under 10nm thickness, widely applied on the metal, inorganic, polymer and coating materials analysis.     

2 Key Analysis Items

    - Surface contamination analysis

    - Element qualitative and quantify analysis

    - Metal Surface degree of oxidation

    - Oxidation thickness analysis

3 Case Study

    Fig. 1: The OK specimen surface analysis result ( That Cu concertration is normal)

   Fig. 2: The NG specimen surface analysis result ( That Cu concertration is abnormal)